I didn't notice any vibration when I was focusing at 10x. However, will vibration appear of a lower magnitude at 60 seconds+? It appears that I did have 1 photo at 128 seconds (ML bracketing); but with a 20mm lens on the 6D, I just couldn't tell. Next time I will use a longer lens, a ND filter and a much longer shutter speed.
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Way too much gear and even more lighting equipment.